FOUP Cleaner
FOUP Cleaner
300mm
300mm
| FOUP Cleaner (300mm)
| FOUP Cleaner (300mm)
Process Application
- 300 mm FOUP Cleaning
- All FOUP applications
- NFC300, VFC301, VFBC301(FOSB)
Process Application
- 300 mm FOUP Cleaning
- All FOUP applications
- NFC300, VFC301, VFBC301(FOSB)
Advantages
- Small Footprint (the smallest area in the world)
- High throughput, N₂ Purge & Close system
Advantages
- Small Footprint (the smallest area in the world)
- High throughput, N₂ Purge & Close system
System Performance
- Separate cleaning of FOUP Body and FOUP
- Spin RPM : Body 0~10 RPM, Cover 0~400 RPM
- 2(Body) x 2(Cover) Cleaning Chambers
- Nozzle : High pressure spray
- Hot DI Cleaning & Hot CDA Drying
- N₂ Purge & Close system
- UPEH : ≥ 20 FOUPs/hour
System Performance
- Separate cleaning of FOUP Body and FOUP
- Spin RPM : Body 0~10 RPM, Cover 0~400 RPM
- 2(Body) x 2(Cover) Cleaning Chambers
- Nozzle : High pressure spray
- Hot DI Cleaning & Hot CDA Drying
- N₂ Purge & Close system
- UPEH : ≥ 20 FOUPs/hour
Robot
- X-Y-Z-R Axis Robot
- Auto Tilting, High Power, Fast Speed
Robot
- X-Y-Z-R Axis Robot
- Auto Tilting, High Power, Fast Speed
