FOUP Inspection System
FOUP Inspection System
FOUP Inspection System
FOUP Inspection System
| FOUP Inspection System
| FOUP Inspection System
Purpose
- FOUP Appearance and Internal Inspection
- Damage detection and dimensional inspection, such as breakage, imprinting, and wafer powder
Purpose
- FOUP Appearance and Internal Inspection
- Damage detection and dimensional inspection, such as breakage, imprinting, and wafer powder
Advantages
- Can be integrated into FOUP Cleaners at customer request
- High throughput, N₂ Purge & Close system
- Cleaner/Inspection System Hybrid type and Standalone Inspection System available.
Advantages
- Can be integrated into FOUP Cleaners at customer request
- High throughput, N₂ Purge & Close system
- Cleaner/Inspection System Hybrid type and Standalone Inspection System available.
| Category | Inspection Items | |
| FOUP Interior | – Wafer presence – Damage, broken wafer pieces |
– Slot Pitch, Width |
| FOUP Door | – Retainer Tip Damage, Pitch | – Gasket damage, position |
| FOUP Top | – Handling Flange, Missing screws | – Flange Damage |
| FOUP Bottom | – Missing screws | – Breaks, Crack, damage |
| FOUP Side | – Side handle damage | – Fixed latch damage |
