Parts
Parts
Parts/Filter
Parts/Filter
● ESC/ALN Heater
- Etch ESC
- Implanter ESC
- CVD ESC
- ALN Heater
● ESC/ALN Heater
- Etch ESC
- Implanter ESC
- CVD ESC
- ALN Heater
Etch ESC
Etch ESC
Implanter ESC
Implanter ESC
CVD ESC
CVD ESC
ALN Heater
ALN Heater
● Ceramic/Quartz
- Ceramic Dome (Unused/Repair)
- Gas Nozzle/Injector/Lid
- Robot Blade/PEC
- Quartz/Sapphire
● Ceramic/Quartz
- Ceramic Dome (Unused/Repair)
- Gas Nozzle/Injector/Lid
- Robot Blade/PEC
- Quartz/Sapphire
Ceramic Dome
Ceramic Dome
Nozzle/Lid/Injector
Nozzle/Lid/Injector
Robot Blade/PEC
Robot Blade/PEC
Quartz/Sapphire
Quartz/Sapphire
● Miscellaneous Parts
- Dual Teflon Centering
- Non-Slip Pad
- HS-Flange
- HOT N2
● Miscellaneous Parts
- Dual Teflon Centering
- Non-Slip Pad
- HS-Flange
- HOT N2
Dual Teflon Centering
Dual Teflon Centering
Non-Slip Pad
Non-Slip Pad
HS-Flange
HS-Flange
Hot N2
Hot N2
● Chemical / Metal Gas Filter (Cobetter Co.)
- Chemical Filter (Wet, Litho , CMP)
- Metal Gas Filter / Diffuser
- Membrane
- AMC
● Chemical / Metal Gas Filter (Cobetter Co.)
- Chemical Filter (Wet, Litho , CMP)
- Metal Gas Filter / Diffuser
- Membrane
- AMC
Chemical Filter (Wet)
Chemical Filter (Wet)
Chemical Filter (Litho)
Chemical Filter (Litho)
Chemical Filter (CMP)
Chemical Filter (CMP)
Gas Filter
Gas Filter
Membrane
Membrane
AMC
AMC
