Vacuum System
Vacuum System
VTS2
VTS2
| VTS (Vacuum Transfer System)
| VTS (Vacuum Transfer System)
Specification
- Panel Size : 2G ~ 8.6G
- Tact Time : T.B.D
- Loadlock System · Buffer System · FLIP System · MASK Stocker
- Transfer System
- Aligner System
- Glass Detecting & ESD Sensor…
- Customizable at user request
Specification
- Panel Size : 2G ~ 8.6G
- Tact Time : T.B.D
- Loadlock System · Buffer System · FLIP System · MASK Stocker
- Transfer System
- Aligner System
- Glass Detecting & ESD Sensor…
- Customizable at user request
