FOUP Automation
FOUP Automation
Sorter & Compiler
Sorter & Compiler
200mm Sorter 4 Cassette
200mm Sorter 4 Cassette
300mm Compiler 10 FOUPs
300mm Compiler 10 FOUPs
300mm Sorter 4 FOUPs
300mm Sorter 4 FOUPs
300mm EFEM 3 FOUPs
300mm EFEM 3 FOUPs
● SEMI Standard Compliance Fully Integrated System
- Mini-Environment
- Wafer Transfer Robot (included Y-base)
- FOUP Opener
- Pre-Aligner (Non contact wafer align)
- Robot M.I Sensor
- Quality and human safety sensors fitted
● SEMI Standard Compliance Fully Integrated System
- Mini-Environment
- Wafer Transfer Robot (included Y-base)
- FOUP Opener
- Pre-Aligner (Non contact wafer align)
- Robot M.I Sensor
- Quality and human safety sensors fitted
● Easy Operating & Maintenance
- User I/F with color touch screen
- User requested S/W available
● Easy Operating & Maintenance
- User I/F with color touch screen
- User requested S/W available
● High Reliability & Short Cycle Time
● Easy Interoperability
● 2 to 10 FOSB/FOUP Available
● 8~12 Port Compiler production
● High Reliability & Short Cycle Time
● Easy Interoperability
● 2 to 10 FOSB/FOUP Available
● 8~12 Port Compiler production
