FOUP Automation

FOUP Automation

PLP EFEM

PLP EFEM

EFEM 4Port 2 EQ Docking Type

EFEM 4Port 2 EQ Docking Type

EFEM 2 Port Type 1

EFEM 2 Port Type 1

EFEM 2 Port Type 2

EFEM 2 Port Type 2

● PLP EFEM System (2P~4P)

  • PLP (Panel Level Packaging) FOUP EFEM
  • Available in 510×515 & 600×600, and other PLP sizes available at user request
  • Flexible design according to User request
  • Multiple current domestic and foreign customers

● PLP EFEM System (2P~4P)

  • PLP (Panel Level Packaging) FOUP EFEM
  • Available in 510×515 & 600×600, and other PLP sizes available at user request
  • Flexible design according to User request
  • Multiple current domestic and foreign customers